Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
David Charles Smith0
Dennis M. Hausmann0
Date of Patent
January 26, 2021
0Patent Application Number
168204310
Date Filed
March 16, 2020
0Patent Citations
Patent Citations Received
Patent Primary Examiner
Patent abstract
Methods and apparatuses for selectively depositing oxide on an oxide surface relative to a nitride surface are described herein. Methods involve pre-treating a substrate surface using ammonia and/or nitrogen plasma and selectively depositing oxide on an oxide surface using alternating pulses of an aminosilane silicon precursor and an oxidizing agent in a thermal atomic layer deposition reaction without depositing oxide on an exposed nitride surface.
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