Is a
Patent attributes
Patent Applicant
Patent Jurisdiction
Patent Number
Patent Inventor Names
Jang-sun Kim0
Date of Patent
February 2, 2021
0Patent Application Number
165590870
Date Filed
September 3, 2019
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A method of manufacturing a semiconductor device includes: providing a first photoresist pattern on a wafer; measuring an overlay of the first photoresist pattern; generating a first overlay model function by a first overlay regression analysis of the measured overlay; and generating a second overlay model function by a second overlay regression analysis of a difference between the measured overlay and the first overlay model function.
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