US Patent 10910653 Anodes for lithium-based energy storage devices

An anode for a lithium-based energy storage device such as a lithium-ion battery is disclosed. The anode includes an electrically conductive current collector comprising a metal oxide layer and a continuous porous lithium storage layer provided over the metal oxide layer. The continuous porous lithium storage layer includes at least 40 atomic % silicon, germanium or a combination thereof. A method of making the anode includes providing an electrically conductive current collector having an electrically conductive layer and a metal oxide layer provided over the electrically conductive layer. The metal oxide layer may have an average thickness of at least 0.05 μm. A continuous porous lithium storage layer is deposited over the metal oxide layer by PECVD.