Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Dror Shemesh0
Nicolas L. Breil0
Vadim Kuchik0
Date of Patent
February 16, 2021
Patent Application Number
16050412
Date Filed
July 31, 2018
Patent Citations Received
Patent Primary Examiner
Patent abstract
A method for detecting voids in a metal line of a semiconductor device die includes: scanning an electron beam upon a selected location on the die containing the metal line; determine gray levels in an image produced by collected electrons of the electron beam backscattered from the selected location on the die; and identifying one or more voids in the metal line based on differences between the gray levels in the image.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
