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US Patent 10923361 Deposition of organic films

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
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Date Filed
October 21, 2019
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Date of Patent
February 16, 2021
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Patent Application Number
16659012
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Patent Citations
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US Patent 10204782 Combined anneal and selective deposition process
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US Patent 10343186 Vapor phase deposition of organic films
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US Patent 10373820 Deposition of organic films
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US Patent 10428421 Selective deposition on metal or metallic surfaces relative to dielectric surfaces
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US Patent 10453701 Deposition of organic films
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US Patent 10695794 Vapor phase deposition of organic films
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US Patent 10546741 Selective growth method
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US Patent 10854460 Deposition of organic films
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US Patent 10014212 Selective deposition of metallic films
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US Patent 10041166 Reaction chamber passivation and selective deposition of metallic films
Patent Citations Received
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US Patent 11446699 Vapor phase deposition of organic films
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US Patent 11387107 Deposition of organic films
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US Patent 11389824 Vapor phase deposition of organic films
Patent Inventor Names
Delphine Longrie
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Eva E. Tois
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Hidemi Suemori
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Jan Willem Maes
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Krzysztof Kachel
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Suvi P. Haukka
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Varun Sharma
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Viljami J. Pore
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
10923361
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Patent Primary Examiner
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Seahvosh Nikmanesh
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