Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Mehrnaz Youssefi0
Julius Minglin Tsai0
Date of Patent
March 30, 2021
Patent Application Number
16739687
Date Filed
January 10, 2020
Patent Citations Received
Patent Primary Examiner
Patent abstract
Described herein is a MEMS force sensor with stress concentration design. The stress concentration can be performed by providing slots, whether through or blind, and/or selective thinning of the substrate. The MEMS force sensor is in chip scale package with solder bumps or metal pillars and there are sensing elements formed on the sensor substrate at the stress concentrate area. The stress concentration can be realized through slots, selective thinning and a combination of both.
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