Is a
Patent attributes
Patent Applicant
Patent Jurisdiction
Patent Number
Patent Inventor Names
Ali Foughi0
Dan Benjamin0
Ryan Diestelhorst0
Julius Minglin Tsai0
Michael Dueweke0
Date of Patent
April 2, 2024
0Patent Application Number
176764770
Date Filed
February 21, 2022
0Patent Citations
...
Patent Primary Examiner
Patent abstract
In one embodiment, a ruggedized wafer level microelectromechanical (“MEMS”) force sensor includes a base and a cap. The MEMS force sensor includes a flexible membrane and a sensing element. The sensing element is electrically connected to integrated complementary metal-oxide-semiconductor (“CMOS”) circuitry provided on the same substrate as the sensing element. The CMOS circuitry can be configured to amplify, digitize, calibrate, store, and/or communicate force values through electrical terminals to external circuitry.
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