Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
March 30, 2021
Patent Application Number
16686418
Date Filed
November 18, 2019
Patent Citations
Patent Primary Examiner
Patent abstract
A method for determining one or more optimized values of an operational parameter of a sensor system configured for measuring a property of a substrate is disclosed the method including: determining a quality parameter for a plurality of substrates; determining measurement parameters for the plurality of substrates obtained using the sensor system for a plurality of values of the operational parameter; comparing a substrate to substrate variation of the quality parameter and a substrate to substrate variation of a mapping of the measurement parameters; and determining the one or more optimized values of the operational parameter based on the comparing.
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