Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
January 7, 2020
Patent Application Number
16132520
Date Filed
September 17, 2018
Patent Citations
Patent Citations Received
Patent Primary Examiner
Patent abstract
A method for determining one or more optimized values of an operational parameter of a sensor system configured to measure a property of a substrate is disclosed. The method includes: determining a quality parameter for a plurality of substrates; determining measurement parameter values for the plurality of substrates using the sensor system for a plurality of values of the operational parameter; comparing a substrate to substrate variation of the quality parameter and a substrate to substrate variation of a mapping of the measurement parameter values; and determining the one or more optimized values of the operational parameter based on the comparing.
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