Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Sebastianus Adrianus Goorden
Filippo Alpeggiani
Simon Reinald Huisman
Sergei Sokolov
Date of Patent
September 19, 2023
Patent Application Number
17782570
Date Filed
November 16, 2020
Patent Citations
Patent Primary Examiner
Patent abstract
Disclosed is a method for determining a stage position or correction therefor in a lithographic process. The method comprises obtaining transmission data describing the transmission of alignment radiation onto the substrate; obtaining position data relating to a stage position of said stage and/or a sensor position of said sensor. A weighting is determined for the position data based on said transmission data. The position based on said transmission data, position data and weighting.
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