Is a
Patent attributes
Patent Applicant
Patent Jurisdiction
Patent Number
Patent Inventor Names
Heebok Kang0
Youngbin Choi0
Date of Patent
March 30, 2021
0Patent Application Number
152034860
Date Filed
July 6, 2016
0Patent Citations Received
Patent Primary Examiner
Patent abstract
Provided are a substrate chuck and a substrate bonding system including the substrate chuck. The substrate bonding system includes a lower substrate chuck and an upper substrate chuck disposed on the lower substrate chuck. The lower substrate chuck has a non-flat lower substrate contact surface, and the upper substrate chuck has a flat upper substrate contact surface.
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