Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
April 6, 2021
Patent Application Number
16538474
Date Filed
August 12, 2019
Patent Citations Received
Patent Primary Examiner
Patent abstract
An apparatus and method of operating an atomic force profiler (AFP), such as an AFM, using a feedforward control signal in subsequent scan lines of a large area sample to achieve large throughput advantages in, for example, automated applications.
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