Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
April 20, 2021
Patent Application Number
15211160
Date Filed
July 15, 2016
Patent Citations
Patent Primary Examiner
Patent abstract
An insulator is formed over a substrate, an opening is formed in the insulator, and an oxide semiconductor is formed in the opening. Then, part of the insulator is removed to expose a side surface of the oxide semiconductor.
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