Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
April 27, 2021
Patent Application Number
16556025
Date Filed
August 29, 2019
Patent Citations Received
Patent Primary Examiner
Patent abstract
A method for treating a substrate includes a mixing step of preparing an ozone treatment fluid containing an ozone gas and a substrate treating step of treating a surface of the substrate using the ozone treatment fluid. In the substrate treating step, light is irradiated to the substrate by a lamp.
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