US Patent 10991603 Apparatus and method for treating substrate
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Patent abstract
A method for treating a substrate includes a mixing step of preparing an ozone treatment fluid containing an ozone gas and a substrate treating step of treating a surface of the substrate using the ozone treatment fluid. In the substrate treating step, light is irradiated to the substrate by a lamp.
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Patent Jurisdiction
Patent Number
109916030
Date of Patent
April 27, 2021
0Patent Application Number
165560250
Date Filed
August 29, 2019
0Official Website
Patent Primary Examiner
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Patent Jurisdiction
Patent Number
109916030
Date of Patent
April 27, 2021
0Patent Application Number
165560250
Date Filed
August 29, 2019
0Official Website
Patent Primary Examiner
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US Patent 10991603 Apparatus and method for treating substrate
Infobox
Is a
Patent jurisdiction
Patent number
10991603
Date of patent
April 27, 2021
Patent application number
16556025
Date Filed
August 29, 2019
Patent primary examiner
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