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US Patent 11004660 Variable output impedance RF generator

Patent 11004660 was granted and assigned to Eagle Harbor Technologies, Inc. on May, 2021 by the United States Patent and Trademark Office.

OverviewStructured DataIssuesContributors
Is a
Patent
Patent
Current Assignee
Eagle Harbor Technologies, Inc.
Eagle Harbor Technologies, Inc.
Date Filed
November 26, 2019
Date of Patent
May 11, 2021
Patent Applicant
Eagle Harbor Technologies, Inc.
Eagle Harbor Technologies, Inc.
Patent Application Number
16697173
Patent Citations
‌
US Patent 10483090 Restricted capacitor switching
0
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US Patent 10510575 Substrate support with multiple embedded electrodes
‌
US Patent 10631395 Inductively coupled pulsed RF voltage multiplier
0
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US Patent 10659019 Nanosecond pulser ADC system
‌
US Patent 10896809 High voltage switch with isolated power
0
‌
US Patent 10020800 High voltage nanosecond pulser with variable pulse width and pulse repetition frequency
0
‌
US Patent 10217608 Switching circuit for RF currents
‌
US Patent 10224822 Nanosecond pulser
0
‌
US Patent 10373804 System for tunable workpiece biasing in a plasma reactor
0
‌
US Patent 10304661 Arbitarary waveform generation using nanosecond pulses
•••
Patent Citations Received
‌
US Patent 12111341 In-situ electric field detection method and apparatus
0
‌
US Patent 11462389 Pulsed-voltage hardware assembly for use in a plasma processing system
0
‌
US Patent 11476090 Voltage pulse time-domain multiplexing
‌
US Patent 11476145 Automatic ESC bias compensation when using pulsed DC bias
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US Patent 11495470 Method of enhancing etching selectivity using a pulsed plasma
0
‌
US Patent 11502672 High voltage nanosecond pulser with variable pulse width and pulse repetition frequency
0
‌
US Patent 11508554 High voltage filter assembly
‌
US Patent 11539352 Transformer resonant converter
‌
US Patent 11558048 High voltage nanosecond pulser
0
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US Patent 11569066 Pulsed voltage source for plasma processing applications
•••
Patent Inventor Names
James Prager
0
Timothy Ziemba
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
11004660
Patent Primary Examiner
‌
Amy Cohen Johnson

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