Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
May 25, 2021
Patent Application Number
16698905
Date Filed
November 27, 2019
Patent Citations
Patent Primary Examiner
Patent abstract
An apparatus for removing particles from a clamp, the apparatus being arrangeable in proximity of the clamp and comprising an insulating portion, a supporting portion, at least a part or all of the insulating portion being arranged on the supporting portion, wherein the supporting portion is configured such that when a voltage is applied to the supporting portion of the apparatus and/or to an electrode of the clamp, the supporting portion acts as an electrode to allow an electric field to be generated between the apparatus and the clamp for removal of the particles from the clamp.
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