Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Uday Kiran Rokkam0
Eric Hill0
Date of Patent
May 25, 2021
0Patent Application Number
162058990
Date Filed
November 30, 2018
0Patent Citations
...
Patent Citations Received
Patent Primary Examiner
Patent abstract
A lift pin and a substrate support assembly and reactor including the lift pin are disclosed. The lift pin includes first section comprising a material having a first transparency and a second section comprising a material having a second transparency. The lift pin can provide improved temperature uniformity across substrate support assembly including the lift pin during substrate processing.
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