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US Patent D958764 Higher temperature vented susceptor

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Is a

Patent attributes

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

Patent Inventor Names

Sam Kim0

Saket Rathi0

Dakai Bian0

Uday Kiran Rokkam0

Date of Patent

July 26, 2022

Patent Application Number

29782159

Date Filed

May 4, 2021

Patent Citations

US Patent 10376916 Substrate processing system having susceptorless substrate support with enhanced substrate heating control

US Patent 10068791 Wafer susceptor for forming a semiconductor device and method therefor

US Patent 11018047 Hybrid lift pin

Patent Citations Received

US Patent D1012051 Electrostatic chuck for semiconductor manufacturing device

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US Patent D989012 Elastic membrane

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US Patent 11764101 Susceptor for semiconductor substrate processing

US Patent D1021832 Elastic membrane

0

US Patent D1006768 Semiconductor wafer for mosaic solar cell fabrication

0

Patent Primary Examiner

Elizabeth J Oswecki

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