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US Patent D958764 Higher temperature vented susceptor

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Edits on 11 Apr, 2024
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Patent Citations Received
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US Patent D1021832 Elastic membrane
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Edits on 30 Jan, 2024
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edited on 30 Jan, 2024
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US Patent D1012051 Electrostatic chuck for semiconductor manufacturing device
0
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edited on 7 Dec, 2023
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US Patent D1006768 Semiconductor wafer for mosaic solar cell fabrication
0
Edits on 20 Sep, 2023
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edited on 20 Sep, 2023
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Patent Citations Received
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US Patent 11764101 Susceptor for semiconductor substrate processing
Edits on 14 Aug, 2023
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edited on 14 Aug, 2023
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Patent Inventor Names
Dakai Bian0
Saket Rathi0
Sam Kim0
Uday Kiran Rokkam0
Edits on 14 Jun, 2023
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Patent Citations Received
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US Patent D989012 Elastic membrane
0
Edits on 18 May, 2023
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edited on 18 May, 2023
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US Patent D0958764 Higher temperature vented susceptor US Patent D958764 Higher temperature vented susceptor

Infobox
Patent Number
D095876400
Patent Number
D95876400
Edits on 27 Apr, 2023
"Entity importer update"
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Golden AI
edited on 27 Apr, 2023
Infobox
Is a
Patent
Patent
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
D09587640
Date of Patent
July 26, 2022
0
Patent Application Number
297821590
Date Filed
May 4, 2021
0
Patent Citations
‌
US Patent 10068791 Wafer susceptor for forming a semiconductor device and method therefor
0
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US Patent 10376916 Substrate processing system having susceptorless substrate support with enhanced substrate heating control
0
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US Patent 11018047 Hybrid lift pin
0
Patent Primary Examiner
‌
Elizabeth J Oswecki
0
CPC Code
‌
C23C 14/50
0
‌
C23C 14/505
0
‌
C23C 16/50
0
‌
C23C 16/481
0
‌
C23C 16/46
0
‌
C23C 16/463
0
‌
C23C 16/466
0
‌
C23C 16/458
0
‌
C23C 16/4582
0
‌
C23C 16/4587
0
‌
C23C 16/4583
0
‌
C23C 16/4581
0
‌
H01L 21/67005
0
‌
H01L 21/67011
0
‌
H01L 21/67098
0
‌
H01L 21/67115
0
‌
H01L 21/67109
0
‌
H01L 21/67103
0
‌
H01L 21/67063
0
Edits on 25 Apr, 2023
"update citations for inverse infoboxes"
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Golden AI
edited on 25 Apr, 2023
Edits on 4 Apr, 2023
"update citations for inverse infoboxes"
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edited on 4 Apr, 2023
Edits on 26 Sep, 2022
"Entity importer update"
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Golden AI
edited on 26 Sep, 2022
Infobox
Is a
Patent
Patent
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
D09587640
Date of Patent
July 26, 2022
0
Patent Application Number
297821590
Date Filed
May 4, 2021
0
Patent Citations
‌
US Patent 10068791 Wafer susceptor for forming a semiconductor device and method therefor
0
‌
US Patent 10376916 Substrate processing system having susceptorless substrate support with enhanced substrate heating control
0
‌
US Patent 11018047 Hybrid lift pin
0
Patent Primary Examiner
‌
Elizabeth J Oswecki
0
CPC Code
‌
C23C 14/50
0
‌
C23C 14/505
0
‌
C23C 16/50
0
‌
C23C 16/481
0
‌
C23C 16/46
0
‌
C23C 16/463
0
‌
C23C 16/466
0
‌
C23C 16/458
0
‌
C23C 16/4582
0
‌
C23C 16/4587
0
‌
C23C 16/4583
0
‌
C23C 16/4581
0
‌
H01L 21/67005
0
‌
H01L 21/67011
0
‌
H01L 21/67098
0
‌
H01L 21/67115
0
‌
H01L 21/67109
0
‌
H01L 21/67103
0
‌
H01L 21/67063
0
Edits on 25 Sep, 2022
"update citations for inverse infoboxes"
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Golden AI
edited on 25 Sep, 2022
Edits on 22 Sep, 2022
"update citations for inverse infoboxes"
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edited on 22 Sep, 2022
Edits on 27 Jul, 2022
"Created via: Entity Importer"
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Golden AI
created this topic on 27 Jul, 2022
Edits made to:
Infobox (+29 properties)
‌

 US Patent D0958764 Higher temperature vented susceptor

Infobox
Is a
Patent
Patent
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
D0958764
Date of patent
July 26, 2022
Patent application number
29782159
Date Filed
May 4, 2021
Patent citations
‌
US Patent 10068791 Wafer susceptor for forming a semiconductor device and method therefor
‌
US Patent 10376916 Substrate processing system having susceptorless substrate support with enhanced substrate heating control
‌
US Patent 11018047 Hybrid lift pin
Patent primary examiner
‌
Elizabeth J Oswecki
CPC Code
‌
C23C 14/50
‌
C23C 14/505
‌
C23C 16/50
‌
C23C 16/481
‌
C23C 16/46
‌
C23C 16/463
‌
C23C 16/466
‌
C23C 16/458
‌
C23C 16/4582
‌
C23C 16/4587
‌
C23C 16/4583
‌
C23C 16/4581
‌
H01L 21/67005
‌
H01L 21/67011
‌
H01L 21/67098
‌
H01L 21/67115
‌
H01L 21/67109
‌
H01L 21/67103
‌
H01L 21/67063

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