Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Theodorus Oosterlaken0
Date of Patent
June 1, 2021
Patent Application Number
16128282
Date Filed
September 11, 2018
Patent Citations
...
Patent Citations Received
Patent Primary Examiner
Patent abstract
A substrate processing apparatus, comprising a substrate support (32) provided with a support surface (34) for supporting a substrate or a substrate carrier (24) thereon and a support heater (50) constructed and arranged to heat the support surface (34). The apparatus comprises a heat shield constructed and arranged to cover and shield the substrate support (32) when no substrate or substrate carrier (24) is on the support surface.
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