Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Masafumi Urakawa0
Masanori Asahara0
Yuki Sugawara0
Date of Patent
June 15, 2021
0Patent Application Number
159893240
Date Filed
May 25, 2018
0Patent Citations Received
Patent Primary Examiner
Patent abstract
There is provision of a member used in a plasma processing apparatus configured to generate plasma from a gas in a processing vessel and to process a substrate disposed on a mounting base in the processing vessel using the plasma. The member includes a surface exposed to the plasma in the processing vessel in a state installed in the processing vessel, and a coating layer including cobalt which covers a part of the surface.
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