Is a
Patent attributes
Patent Applicant
Patent Jurisdiction
Patent Number
Patent Inventor Names
Zhiyuan Ye
Richard O. Collins
Kartik Bhupendra Shah
Schubert Chu
Zhepeng Cong
Nyi Oo Myo
Date of Patent
October 10, 2023
Patent Application Number
17224537
Date Filed
April 7, 2021
Patent Citations
...
Patent Primary Examiner
Patent abstract
Embodiments disclosed herein generally provide improved control of gas flow in processing chambers. In at least one embodiment, a liner for a processing chamber includes an annular body having a sidewall and a vent formed in the annular body for exhausting gas from inside to outside the annular body. The vent comprises one or more vent holes disposed through the sidewall. The liner further includes an opening in the annular body for substrate loading and unloading.
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