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US Patent 11781212 Overlap susceptor and preheat ring

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
Date Filed
April 7, 2021
Date of Patent
October 10, 2023
Patent Applicant
Applied Materials
Applied Materials
Patent Application Number
17224537
Patent Citations
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US Patent 8372203 Apparatus temperature control and pattern compensation
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US Patent 7520957 Lid assembly for front end of line fabrication
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US Patent 7767024 Method for front end of line fabrication
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US Patent 7942969 Substrate cleaning chamber and components
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US Patent 8343307 Showerhead assembly
‌
US Patent 11208725 Substrate processing apparatus
‌
US Patent 11232933 Temperature and bias control of edge ring
‌
US Patent 11239063 Vacuum processing apparatus
‌
US Patent 11273464 Substrate processing apparatus
‌
US Patent 11289312 Physical vapor deposition (PVD) chamber with in situ chamber cleaning capability
•••
Patent Inventor Names
Zhiyuan Ye
Richard O. Collins
Kartik Bhupendra Shah
Schubert Chu
Zhepeng Cong
Nyi Oo Myo
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
11781212
Patent Primary Examiner
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Jethro M. Pence

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