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US Patent 11037822 Svia using a single damascene interconnect
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Patent
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Date Filed
May 8, 2019
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Date of Patent
June 15, 2021
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Patent Application Number
16406447
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Patent Citations
US Patent 10020255 Integration of super via structure in BEOL
US Patent 10026687 Metal interconnects for super (skip) via integration
US Patent 10020254 Integration of super via structure in BEOL
Patent Citations Received
US Patent 11600519 Skip-via proximity interconnect
Patent Inventor Names
Yongan Xu
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Joe Lee
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Muthumanickam Sankarapandian
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Yann Mignot
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
11037822
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Patent Primary Examiner
Syed I Gheyas
0
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