Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Joe Lee0
Ruqiang Bao0
Yann Mignot0
Yongan Xu0
Junli Wang0
Hosadurga Shobha0
Date of Patent
July 10, 2018
0Patent Application Number
157987940
Date Filed
October 31, 2017
0Patent Citations Received
...
Patent Primary Examiner
Patent abstract
Semiconductor devices including super via structures and BEOL processes for forming the same, according to embodiments of the invention, generally include removing selected portions of a nitride cap layer intermediate interconnect levels, wherein the selected portions correspond to the regions where the super via structure is to be formed and where underlying overlay alignment markers are located.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
