Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Junli Wang0
Su Chen Fan0
Chi-Chun Liu0
Mary Claire Silvestre0
Hsueh-Chung Chen0
Yann Mignot0
Date of Patent
October 8, 2024
0Patent Application Number
174839220
Date Filed
September 24, 2021
0Patent Citations
...
Patent Primary Examiner
Patent abstract
A device includes: a first dielectric material; a first metal line in the first dielectric material; a second dielectric material disposed on the first dielectric material and the first metal line; a second metal line in the second dielectric material; and a plurality of metal vias disposed on a same level and connecting the first metal line and the second metal line, wherein the plurality of metal vias comprise a first top via and a bottom via having different sidewall profile angles.
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