Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Jongbin Park0
Minseok Choi0
Ho Yu0
Inho Choi0
Jeonggil Kim0
Jinhwan Lee0
Date of Patent
June 29, 2021
0Patent Application Number
167333250
Date Filed
January 3, 2020
0Patent Citations
Patent Citations Received
Patent Primary Examiner
Patent abstract
An apparatus for removing residues from a source vessel in an extreme ultraviolet lithography device, the apparatus including a frame portion, and a heater structure on the frame portion, the heater structure having a head on the frame portion, the head being rotatable in at least one shaft direction, and a heater on the head to dissipate heat toward residues in the source vessel, the heater to apply temperature of 200° C. to 800° C.
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