Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Peng Xu0
Heng Wu0
Juntao Li0
Kangguo Cheng0
Date of Patent
June 29, 2021
0Patent Application Number
169394150
Date Filed
July 27, 2020
0Patent Citations
Patent Citations Received
Patent Primary Examiner
Patent abstract
Inner and outer spacers for nanosheet transistors are formed using techniques that improve junction uniformity. One nanosheet transistor device includes outer spacers and an interlevel dielectric layer liner made from the same material. A second nanosheet transistor device includes outer spacers, inner spacers and an interlevel dielectric layer liner that are all made from the same material.
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