Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
September 7, 2021
Patent Application Number
20190726
Date Filed
July 26, 2019
Patent Citations Received
Patent abstract
Apparatus and methods for providing high velocity gas flow showerheads for deposition chambers are described. The showerhead has a faceplate in contact with a backing plate that has a concave portion to provide a plenum between the backing plate and the faceplate. A plurality of thermal elements is within the concave portion of the backing plate and extends to contact the faceplate.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
