Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
September 20, 2022
0Patent Application Number
173500730
Date Filed
June 17, 2021
0Patent Citations
Patent Primary Examiner
Process chamber lids, processing chambers and methods using the lids are described. The lid includes a pumping liner with a showerhead, blocker plate and gas funnel positioned therein. A liner heater is positioned on the pumping liner to control temperature in the pumping liner. Gas is flowed into the gas funnel using a dead-volume free one-way valve with a remote plasma source.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
