US Patent 11117797 MEMS device and electronics apparatus
Patent 11117797 was granted and assigned to GoerTek on September, 2021 by the United States Patent and Trademark Office.
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Patent abstract
The present invention discloses a MEMS device and an electronics apparatus. The MEMS device comprises: a substrate; a MEMS element placed on the substrate; a cover encapsulating the MEMS element together with the substrate; and a port for the MEMS element to access outside, wherein the port is provided with a filter which has mesh holes and includes electrets to prevent particles from entering into the MEMS element.
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Is a
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
111177970
Date of Patent
September 14, 2021
0Patent Application Number
201610080
Date Filed
October 8, 2016
0Official Website
Edits on 23 Sep, 2022
Golden AI
Infobox
Is a
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
111177970
Date of Patent
September 14, 2021
0Patent Application Number
201610080
Date Filed
October 8, 2016
0Official Website
Edits on 6 Jun, 2022
Golden AI
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Edits on 18 Sep, 2021
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US Patent 11117797 MEMS device and electronics apparatus
Infobox
Is a
Patent applicant
Current assignee
Patent jurisdiction
Patent number
11117797
Date of patent
September 14, 2021
Patent application number
20161008
Date Filed
October 8, 2016
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