US Patent 11164758 Washing device and washing method
Patent 11164758 was granted and assigned to Ebara Corporation on November, 2021 by the United States Patent and Trademark Office.
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Patent abstract
A substrate washing device includes an arm and a two-fluid jet nozzle which is supported on a leading end of the arm. The two-fluid jet nozzle may be moved towards the outer circumference of the substrate from the center of the substrate by a rotation of the arm. The substrate washing device may also include an on-arm washing liquid supply nozzle, which may supply a washing liquid to the upper surface of the substrate in a vicinity of the two-fluid jet nozzle.
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Infobox
Is a
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
111647580
Date of Patent
November 2, 2021
0Patent Application Number
201811130
Date Filed
November 13, 2018
0Official Website
Edits on 25 Sep, 2022
Golden AI
Infobox
Is a
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
111647580
Date of Patent
November 2, 2021
0Patent Application Number
201811130
Date Filed
November 13, 2018
0Official Website
Edits on 6 Jun, 2022
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Edits on 3 Nov, 2021
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US Patent 11164758 Washing device and washing method
Infobox
Is a
Patent applicant
Current assignee
Patent jurisdiction
Patent number
11164758
Date of patent
November 2, 2021
Patent application number
20181113
Date Filed
November 13, 2018
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