US Patent 11181490 Small-angle x-ray scatterometry
Is a
Date Filed
July 4, 2019
0
Date of Patent
November 23, 2021
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Patent Application Number
17254281
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Patent Inventor Names
Matthew Wormington
0
Alex Dikopoltsev
0
Alexander Krokhmal
0
Yuri Vinshtein
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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