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US Patent 12007343 X-ray beam shaping apparatus and method

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Is a

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Patent attributes

Patent Jurisdiction

United States Patent and Trademark Office

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Patent Number

Patent Inventor Names

Nicholas Norberg0

Detlef Beckers0

Milen Gateshki0

Alexander Kharchenko0

Date of Patent

June 11, 2024

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Patent Application Number

176008030

Date Filed

April 3, 2020

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Patent Citations

US Patent 10481111 Calibration of a small angle X-ray scatterometry based metrology system

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US Patent 10782252 Apparatus and method for X-ray analysis with hybrid control of beam divergence

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US Patent 11035805 X-ray analysis apparatus and method

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US Patent 10900912 X-ray analysis apparatus

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US Patent 11181490 Small-angle x-ray scatterometry

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US Patent 7471766 X-ray diffraction apparatus

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US Patent 10359377 Beam shaping slit for small spot size transmission small angle X-ray scatterometry

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Patent Primary Examiner

Thomas R Artman

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Patent abstract

A beam shaping apparatus (

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