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US Patent 12007343 X-ray beam shaping apparatus and method
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Edits on 12 Jun, 2024
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US Patent 12007343 X-ray beam shaping apparatus and method
Article
Patent abstract
A beam shaping apparatus (
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Is a
Patent
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
12007343
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Patent Inventor Names
Alexander Kharchenko
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Detlef Beckers
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Milen Gateshki
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Nicholas Norberg
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Date of Patent
June 11, 2024
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Patent Application Number
17600803
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Date Filed
April 3, 2020
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Patent Citations
US Patent 11181490 Small-angle x-ray scatterometry
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US Patent 7471766 X-ray diffraction apparatus
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US Patent 10359377 Beam shaping slit for small spot size transmission small angle X-ray scatterometry
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US Patent 10481111 Calibration of a small angle X-ray scatterometry based metrology system
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US Patent 10782252 Apparatus and method for X-ray analysis with hybrid control of beam divergence
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US Patent 10900912 X-ray analysis apparatus
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US Patent 11035805 X-ray analysis apparatus and method
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Patent Primary Examiner
Thomas R Artman
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