US Patent 11183404 Diffuser and semiconductor processing system using same
Patent 11183404 was granted and assigned to Taiwan Semiconductor Manufacturing Company on November, 2021 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
April 26, 2019
0
Date of Patent
November 23, 2021
0
Patent Applicant
Patent Application Number
16395666
0
Patent Inventor Names
Yi-Ming Lin
0
Chao-Hung Wan
0
Sheng-chun Yang
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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