Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Mark Saly0
Bhaskar Jyoti Bhuyan0
Date of Patent
November 30, 2021
Patent Application Number
16550486
Date Filed
August 26, 2019
Patent Primary Examiner
Patent abstract
Methods for atomic layer deposition (ALD) of plasma enhanced atomic layer deposition (PEALD) of low-κ films are described. A method of depositing a film comprises exposing a substrate to a silicon precursor having the general formula (I) or general formula (II)
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