Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Michio Kono0
Date of Patent
November 30, 2021
0Patent Application Number
168994370
Date Filed
June 11, 2020
0Patent Primary Examiner
Patent abstract
An exposure apparatus according to the present invention includes an illumination optical system including a first optical modulation unit having a plurality of optical modulation elements, a second optical modulation unit having a plurality of optical modulation elements, and an imaging optical system forming optical images on a predetermined plane by using lights from the first optical modulation unit and the second optical modulation unit, and a projection optical system projecting the optical image formed on the predetermined plane onto a substrate.
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