US Patent 11248905 Machine learning in metrology measurements
Patent 11248905 was granted and assigned to KLA-Tencor on February, 2022 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
December 6, 2017
Date of Patent
February 15, 2022
Patent Applicant
Patent Application Number
15750972
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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