Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
March 1, 2022
Patent Application Number
16042179
Date Filed
July 23, 2018
Patent Citations
Patent Citations Received
Patent Primary Examiner
Patent abstract
A polymer comprising recurring units derived from a sulfonium salt of specific structure having a polymerizable group is coated to form a resist film which is amenable to precise micropatterning because of improved LWR, CDU and resolution.
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