Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yuri Paskover0
Yoni Shalibo0
Vladimir Levinski0
Shlomo Eisenbach0
Gilad Laredo0
Ariel Hildesheim0
Amnon Manassen0
Date of Patent
March 22, 2022
0Patent Application Number
163176030
Date Filed
December 14, 2018
0Patent Citations
Patent Primary Examiner
Metrology methods and tools are provided, which enhance the accuracy of the measurements and enable simplification of the measurement process as well as improving the correspondence between the metrology targets and the semiconductor devices. Methods comprise illuminating the target in a Littrow configuration to yield a first measurement signal comprising a −1
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