Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Tomonori Honda0
Jeffrey Drue David0
Lin Lee Cheong0
Date of Patent
April 5, 2022
0Patent Application Number
170022500
Date Filed
August 25, 2020
0Patent Citations Received
Patent Primary Examiner
A maintenance tool for semiconductor process equipment and components. Sensor data is evaluated by machine learning tools to determine when to schedule maintenance action.
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