US Patent 11295993 Maintenance scheduling for semiconductor manufacturing equipment
Patent 11295993 was granted and assigned to PDF Solutions on April, 2022 by the United States Patent and Trademark Office.
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Patent Inventor Names
Jeffrey Drue David0
Lin Lee Cheong0
Tomonori Honda0
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Patent Number
112959930
Date of Patent
April 5, 2022
0Patent Application Number
170022500
Date Filed
August 25, 2020
0Official Website
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Article (+171 characters)
US Patent 11295993 Maintenance scheduling for semiconductor manufacturing equipment
Article
A maintenance tool for semiconductor process equipment and components. Sensor data is evaluated by machine learning tools to determine when to schedule maintenance action.
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Is a
Patent applicant
Current assignee
Patent jurisdiction
Patent number
11295993
Date of patent
April 5, 2022
Patent application number
17002250
Date Filed
August 25, 2020
Patent primary examiner
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