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US Patent 11302820 Localized protection layer for laser annealing process
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Patent
Date Filed
September 27, 2019
Date of Patent
April 12, 2022
Patent Application Number
16586790
Patent Citations
US Patent 10062692 Field effect transistors with reduced parasitic resistances and method
US Patent 10134856 Semiconductor device including contact plug and method of manufacturing the same
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Patent Inventor Names
Georgios Vellianitis
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Martin Christopher Holland
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Marcus Johannes Henricus Van Dal
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Gerben Doornbos
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Blandine Duriez
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Patent Jurisdiction
United States Patent and Trademark Office
Patent Number
11302820
Patent Primary Examiner
Selim U Ahmed
CPC Code
H01L 29/66795
H01L 21/268
H01L 29/78696
H01L 29/42392
H01L 29/78618
H01L 29/66545
H01L 21/324
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