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US Patent 11307496 Metal brush layer for EUV patterning

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
Date Filed
November 19, 2019
Date of Patent
April 19, 2022
Patent Application Number
16688657
Patent Citations
‌
US Patent 10647829 Surface modification method and surface modification body
‌
US Patent 10345702 Polymer brushes for extreme ultraviolet photolithography
‌
US Patent 10831102 Photoactive polymer brush materials and EUV patterning using the same
‌
US Patent 10138331 Matrix-free polymer nanocomposites and related products and methods thereof
‌
US Patent 10157740 Selective deposition process utilizing polymer structure deactivation process
Patent Citations Received
‌
US Patent 11404379 Structure and method for bridge chip assembly with capillary underfill
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
11307496
Patent Primary Examiner
‌
Amanda C. Walke
CPC Code
‌
G03F 7/0042

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