Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Kenneth J. Giewont0
Yusheng Bian0
Siva P. Adusumilli0
Bo Peng0
Date of Patent
May 3, 2022
0Patent Application Number
170841860
Date Filed
October 29, 2020
0Patent Citations
Patent Citations Received
Patent Primary Examiner
CPC Code
The present disclosure relates to semiconductor structures and, more particularly, to grating couplers integrated with one or more airgap and methods of manufacture. The structure includes: a substrate material comprising one or more airgaps; and a grating coupler disposed over the substrate material and the one or more airgaps.
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