Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Alvin J. Joseph0
Siva P. Adusumilli0
Vibhor Jain0
Steven M. Shank0
Date of Patent
July 2, 2024
0Patent Application Number
178964010
Date Filed
August 26, 2022
0Patent Citations
...
Patent Primary Examiner
Patent abstract
The present disclosure relates to semiconductor structures and, more particularly, to photodetectors with buried airgap mirror reflectors. The structure includes a photodetector and at least one airgap in a substrate under the photodetector.
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