Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
May 3, 2022
Patent Application Number
16290849
Date Filed
March 1, 2019
Patent Citations
Patent Primary Examiner
CPC Code
A semiconductor device including a stacked body that includes insulating layers and conductive layers that are alternately stacked, a first film provided inside a recess portion that penetrates through the stacked body, a second film provided on a surface of the first film, a third film provided on a surface of the second film, and a fourth film provided on a surface of the third film. An average concentration of a halogen element per unit area in the third film and the fourth film is lower than an average concentration of the halogen element per unit area at an interface between the third film and the fourth film.
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