Patent attributes
A method of forming a semiconductor device includes following steps. A semiconductor strip is formed extending above a semiconductor substrate. A shallow trench isolation (STI) region is formed over the semiconductor substrate. The semiconductor strip has a fin structure higher than a top surface of the STI region. The fin structure includes a channel portion and a source/drain (S/D) portion adjacent to the channel portion. A dummy gate stack is formed over the channel portion. The S/D portion is exposed by the dummy gate stack. A doping process is performed to a top of the S/D portion using first dopants. An epitaxy layer is formed around the top of the S/D portion. The epitaxy layer has second dopants. A conductivity type of the second dopants is different from a conductivity type of the first dopants. The dummy gate stack is replaced with a replacement gate stack.
